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| Research on an Indirect Calibration Method of Micro/nano Coordinate Measuring Machine |
| SHI Yu-shu1,2, GAO Si-tian2, SONG Xiao-ping2, GUO Xin3, CHEN Si-wen1, PI Lei2, LI Wei2, LI Qi2, LI Shi2, WANG Xing-wang2 |
1.State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China
2.National Institute of Metrology, Beijing 100029, China
3.College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China |
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Abstract Since the high precision performance index of micro/nano coordinate measuring machine cannot be calibrated accurately, an indirect calibration solution is proposed. The measurement indication error of the micro/nano coordinate measuring machine is measured by gauge blocks and ball plate with hemispheres; The probing error is measured by calibration sphere. And a calibration experiment is done on the micro/nano coordinate measuring machining at National Institute of Metrology. The experimental results show that the error of indication of a CMM for size measurement is less than 0.2 μm, and the probing error is only 0.125 μm. The experiment results indicate that the error of indication of a CMM for size measurement and probing error are both less than their maximum permissible error, verifying the reasonability and feasibility of the calibration plan.
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Received: 31 August 2015
Published: 28 December 2016
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Corresponding Authors:
SHI Yu-shu
E-mail: shiys@nim.ac.cn
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2017, Vol. 38 
