|
|
|
| Measurement and Nonlinear Correction for Micro-displacement of Shear Piezoceramics Stack |
| XU Sheng1,SHI Shu-li2,GAO Si-tian3,CHEN Ben-yong1,LI Qi3 |
1. School of Mechanical Engineering and Automation, Zhejiang Sci-tech University, Hangzhou, Zhejiang 310018, China;
2. School of Instrumentation Science and Opto-electronics Engineering, Beijing Information Science & Technology University, Beijing 100192, China;
3. National Institute of Metrology, Beijing 100029, China |
|
|
|
|
Abstract The shear piezoceramics stack micro-displacement measurement system is built. The second-order, third-order, forth-order least square fitting formulas of voltage with displacement are obtained by the micro-displacement measurement experiments of 5 different target voltage. The result of nonlinear correction used by the third-order least square fitting formula is the best one, the maximal nonlinear error is 3nm when the shear piezoceramics stack moving 1 050nm. The nonlinear correction for different target displacement is realized by spline fitting of the polynomial coefficient to get the relational polynomial expression. The maximal nonlinear error is 4 nm when the shear piezoceramics stack moving 900 nm, which is only 11% of the initial nonlinear error.
|
|
Received: 24 May 2016
Published: 14 October 2016
|
|
|
|
Corresponding Authors:
GAO Si-tian
E-mail: gaost@nim.ac.cn
|
|
|
|
［1］Gu G Y, Zhu L M, Su C Y, et al. Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey［J］.IEEE Transactions on Automation Science and Engineering, 2016, 13(1): 313-332.
［2］Cheng L, Liu W C, Hou Z G, et al. Neural-Network based Nonlinear Model Predictive Control for Piezoelectric Actuators［J］.IEEE Transactions on Industrial Electronics, 2015, 62(12): 7717-7727.
［3］孙立宁, 孙绍云, 曲东升, 等. 基于PZT的微驱动定位系统及控制方法的研究［J］. 光学 精密工程, 2004, 12（1）: 55-59.
［4］魏燕定, 陶慧峰. 压电驱动器迟滞特性的Preisach模型研究［J］. 压电与声光, 2004, 26(5): 364-367.
［5］李庆贤, 高思田, 李伟, 等. 基于HSPMI的激光干涉仪位移校准系统的构建及实验研究［J］. 计量学报, 2013,34（6）: 519-523.
［6］李福良. 基于PA85的新型压电陶瓷驱动电源［J］. 压电与声光, 2005, 27(4): 392-394.
［7］赖志林, 刘向东, 陈振, 等. 基于Preisach逆模型的压电陶瓷执行器迟滞补偿控制［J］. 北京理工大学学报, 2011, 31(4): 447-451.
［8］范伟, 余晓芬, 奚琳. 压电陶瓷驱动系统及控制方法研究［J］. 光学 精密工程, 2007, 15(3): 368-371. |
|
|
|
2016, Vol. 37 
