计量型扫描电子显微镜测控系统研究

doi:10.3969/j.issn.1000-1158.2016.05.01

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Abstract In order to solve the deficiency in precise measurement of micro-nano geometry structure dimension under 100nm of scanning electron microscope(SEM) and realize the quantity transfer and traceability of measurement values, the control and measuring system of metrological SEM is developed. The system consists of the motion control module of positioning stage, the displacement measurement module based on laser interference method and the image acquisition and processing module. The control and measuring system software is developed based on LabVIEW graphical programming language. Finally the measurement experiment of 1 μm×1 μm two-dimensional grid sample is conducted with the system and the results show that the control and measuring system of metrological SEM is in good stability and the indication error of measurement values is better than 10 nm in the 10 μm measuring range.

Key words： metrology metrological SEM quantity traceability motion control module laser heterodyne interferometry image acquisition and processing LabVIEW

Received: 15 January 2016 Published: 29 July 2016

PACS:

TB92

Corresponding Authors: GAO Si-tian E-mail: gaost@nim.ac.cn

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	Articles by authors
	ZHANG Rui-jun
	GAO Si-tian
	LI Wei
	CHEN Ben-yong
	SHI Yu-shu
	LI Qi

Cite this article:

ZHANG Rui-jun,GAO Si-tian,LI Wei, et al. Study on the Measuring and Control System of Metrological Scanning Electron Microscope[J]. Acta Metrologica Sinica, 2016, 37(5): 457-461.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2016.05.01 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2016/V37/I5/457