|
|
|
| Optimal Design for the Structural Parameter of a Touch Trigger Probe |
| XIANG Meng1,LI Rui-jun1,LI Xin-yuan1,FAN Kuang-chao1,2 |
1.School of Instrument Sci & Opto-electric Engineering, Hefei University of Technology, Hefei, Anhui 230009, China
2.Department of Mechanical Engineering, National Taiwan University, Taipei 10617, China |
|
|
|
|
Abstract A high sensitivity touch trigger probe for Micro/Nano CMM has been designed. The principle and the structure of the probe were introduced,and the sensitivity and stiffness models were established. The optimal parameters conforming to the uniform sensitivity and uniform stiffness in 3D were obtained. The stiffness of the probe was verified by simulation. The stiffness, resolution and the stability of the probe were tested. The experimental results show that the probe has uniform stiffness (less than 1 mN/μm) in 3D and the resolution of the probe is higher than 50 nm . The drift of the probe is about 20 nm in 1.3 hours when the fluctuation of the environmental temperature is less than ±0.025 ℃.
|
|
Received: 22 April 2015
Published: 22 March 2016
|
|
|
|
|
|
［1］蒋庄德,王海容,王朝晖.纳米测量技术与微型智能仪器［J］.中国机械工程, 2000, 11(3): 248-251.
［2］陈叶金,范光照,刘玉圣.微器件表面3 D形貌的新型微／纳米探头测量系统［J］.计量学报, 2006, 27(1): 13-17.
［3］李瑞君,范光照,钱剑钊,等.微纳米三坐标测量机接触扫描探头稳定性分析［J］.纳米技术与精密工程, 2012, 10(2): 126-131.
［4］罗志勇,陈朝晖,顾英姿,等.一种密度精密测量方法研究［J］.计量学报,2010,31(4):330-334.
［5］徐毅,高思田,王春艳,等.微机械及纳米计量科学［J］.中国机械工程, 2000, 11(3): 272-274.
［6］徐滨士,欧忠文,马世宁,等.纳米表面工程［J］.中国机械工程, 2000, 11(6): 707-712.
［7］张国雄.三坐标测量机的发展趋势［J］.中国机械工程, 2002, 11(1/2): 222-227.
［8］赵英剑,王建利,马新辉,等. 三坐标测量机智能技术［J］. 计量学报, 2001, 22(3): 164-167.
［9］刘祚时,倪潇娟.三坐标测量机(CMM)的现状和发展趋势［J］.机械制造, 2004, 42(8): 32-34.
［10］Fan K C, Fei Y T, Yu X F, et al. Development of a Low-cost Micro-CMM for 3D Micro/Nano Measurements［J］. Meas Sci Technol, 2006, 17(3): 524-532.
［11］黄强先,余惠娟,黄帅,等.微纳米三坐标测量机测头的研究进展［J］.中国机械工程, 2013, 24(9): 1264-1272.
［12］高伟,陈晓怀,李瑞君,等.一种基于DVD读取头的非接触触发探头［J］.计量学报,2014, 35(1):30-33.
［13］余学锋,于杰.仪器误差符合性测试中的风险控制方法［J］.计量学报,2013,34(1):83-84.
［14］李源,孙薇斌,邵力,等.基于MEMS微触觉测头和纳米测量机的扫描测量平台［J］.仪器仪表学报, 2009, 30(3): 580-585.
［15］冉险生,朱才朝,林立.基于光束法平差单点三坐标测量的新方法［J］.计量学报,2014, 35(5): 409-413.
［16］Fan K C, Cheng F, Chen Y J, et al. Probe Technologies for Micro/Nano Measurements［C］// Institute of Electrical and Electronics Engineers. Proceedings of the 7th IEEE International Conference on Nanotechnology, New York, US, 2007, 989-993.
［17］Claverley J D, Leach R K. A Vibrating Micro-Scale CMM Probe for Measuring High Aspect Ratio Structures［J］. Microsyst Technol, 2010, 16(8-9): 1507-1512.
［18］Schwenke H, Waldele F, Weiskirch C, et al. Opto-tactile Sensor for 2D and 3D Measurement of Small Structures on Coordinate Measuring Machines［J］. Annals of the CIRP, 2001, 50(1): 361-364.
［19］Küng A, Meli F, Thalmann R. Ultraprecision Micro-CMM Using a Low Force 3D Touch Probe［J］. Meas Sci Technol, 2007, 18(2): 319-327.
［20］van Vliet W P, Schellekens P H J. Development of a fast Mechanical Probe for Coordinate Measuring Machines［J］. Precision Engineering, 1998, 22: 141-152.
［21］Kiyoshi Takamasu, Satoshi Ozawa, Takayuki Asano. Basic Concepts of Nano-CMM［C］//The Japan-China Bilateral Symposium on Advanced Manufacturing Engineering, Tokyo, Japan, 1996,155-158.
［22］Fan K C, Cheng F, Wang W L, et al. A Scanning Contact Probe for a Micro-Coordinate Measuring Machine(CMM)［J］. Meas Sci Technol, 2010, 21:603-616.
［23］Chu C L, Chiu C Y. Development of a low-cost Nanoscale Touch Trigger Probe based on two Commercial DVD pick-up heads［J］. Meas Sci Technol, 2007,18: 1831-1842.
［24］Li R J, Fan K C, Zhou H, et al. Elastic mechanism design of the CMM contact probe［C］// Proc of SPIE, Sixth International Symposium on Precision Mechanical Measurements, Gui Yang, China, 2013, 8916:1-10. |
|
|
|
2016, Vol. 37 
