Acta Metrologica Sinica  2016, Vol. 37 Issue (3): 230-234    DOI: 10.3969/j.issn.1000-1158.2016.03.02
Current Issue | Archive | Adv Search |
Optimal Design for the Structural Parameter of a Touch Trigger Probe
XIANG Meng1,LI Rui-jun1,LI Xin-yuan1,FAN Kuang-chao1,2
1.School of Instrument Sci & Opto-electric Engineering, Hefei University of Technology, Hefei, Anhui 230009, China
2.Department of Mechanical Engineering, National Taiwan University, Taipei 10617, China
Download: PDF (1866 KB)   HTML (1 KB) 
Export: BibTeX | EndNote (RIS)      
Abstract  A high sensitivity touch trigger probe for Micro/Nano CMM has been designed. The principle and the structure of the probe were introduced,and the sensitivity and stiffness models were established. The optimal parameters conforming to the uniform sensitivity and uniform stiffness in 3D were obtained. The stiffness of the probe was verified by simulation. The stiffness, resolution and the stability of the probe were tested. The experimental results show that the probe has uniform stiffness (less than 1 mN/μm) in 3D and the resolution of the probe is higher than 50 nm . The drift of the probe is about 20 nm in 1.3 hours when the fluctuation of the environmental temperature is less than ±0.025 ℃.
Key wordsmetrology      CMM      touch trigger probe      elastic mechanism      parameters optimization     
Received: 22 April 2015      Published: 22 March 2016
PACS:  TB92  
Service
E-mail this article
Add to my bookshelf
Add to citation manager
E-mail Alert
RSS
Articles by authors
XIANG Meng
LI Rui-jun
LI Xin-yuan
FAN Kuang-chao
Cite this article:   
XIANG Meng,LI Rui-jun,LI Xin-yuan, et al. Optimal Design for the Structural Parameter of a Touch Trigger Probe[J]. Acta Metrologica Sinica, 2016, 37(3): 230-234.
URL:  
http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2016.03.02     OR     http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2016/V37/I3/230
Copyright © Editorial Board of Acta Metrologica Sinica
Supported by:Beijing Magtech