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| Development of Atomic Force Microscopy Measuring Head Based on Quartz Tuning Fork Probe |
| LIU Lei-hua1,2,GUO Tong1,LI Wei2,WANG He-qun2,GAO Si-tian2 |
1.State Key Laboratory of Precision Measuring Technology and Instrument, Tianjin University, Tianjin 300072, China
2.National Institute of Metrology, Beijing 100029, China |
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Abstract A self-sensing atomic force microscope (AFM) measuring head is developed based on a commercial quartz turning fork probe. The measuring head is easy to integrate and it can detect the amplitude variations of the cantilever through the electrical signal instead of using optical detection components. A weak signal detection and parasitic capacitance compensation circuit is designed for the measuring head. The amplitude signal of the measuring head is obtained using a commercial lock-in amplifier. And on this base the force-distance curve and resolution of the measuring head in amplitude modulation mode is tested. Using the PID module in lock-in amplifier, the topography of the sample is measured in amplitude modulation mode. The results indicated that the sensitivity of the measuring head is 0.624 mV/nm, and the resolution of the measuring head can reach less than 2 nm.
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Received: 24 July 2015
Published: 22 March 2016
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2016, Vol. 37 
