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| Research on Method and Device of Non-disperse Atomic Fluorescence Exciting Source Impurity Detection |
| JIA Ya-qing,WU Hong,SHEN Zheng-sheng |
| Beijing Institute of Metrology, Beijing 100029, China |
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Abstract A detect method of impurity in non-dispersive atomic fluorescence exciting source is studied, and a kind of detection device is developed. A set of application software of the device is developed. The detection wavelength range of the device is 190～350nm, the maximum allowable error is ±0.3nm. It achieved fast detection function of the excitation light source impurity. Detection device and software are verified by the experiments.
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Received: 24 August 2015
Published: 16 June 2017
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2017, Vol. 38 
