Effect of Wave Plates and Polarizer on the Nonlinearity of Heterodyne Interferometers
REN Xiao1,2,HOU Wen-mei3
1.College of Mechanical & Electronic Engineering and Automation,Shanghai University,Shanghai 200072,China
2.Soochow University,Suzhou,Jiangsu 215006,China
3.College of Optic & Electronic Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China
Abstract To reduce the nonlinearity error of heterodyne interferometer,the influence mechanics of wave plate and polarizer upon nonlinearity error must be determined.Theoretical and experimental analysis showed that different influence on non-linearity exits when wave plate and polarizer were placed in the front of or behind the polarized beam splitter.If the error wave plate and polarizer were placed in front of the polarization beam splitter,non-linearity was introduced definitely due to error.If the same optical components are installed inside the interferometer,it is possible to affect the nonlinearity,but usually with a factor in an order of about 10-2.
REN Xiao,HOU Wen-mei. Effect of Wave Plates and Polarizer on the Nonlinearity of Heterodyne Interferometers[J]. Acta Metrologica Sinica, 2011, 32(6): 490-494.
［1］Hou W M,Wilkening G.Investigation and Compensation of the Nonlinearity of Heterodyne Interferometers［J］.Prec Eng,1992,14(2): 91－98.
［2］Stone J A,Howard L P.A Simple technique for observing periodic monlinearities in michelson interferometers［J］.Prec Eng,1998,22(4): 220－232.
［3］Hou W M,Zhao X B.The drift of the nonlinearity of heterodyne interferometers［J］.Prec Eng,1994,16(1):25－34.
［4］邱宗明,等.塞曼外差激光干涉仪的非线性分析及校正［J］.光子学报,1998,27(11): 991－995.
［5］侯文玫,王 俊.外差激光干涉仪非线性的细分和消除［J］.计量学报,2007,28(3):210－215.
［6］陈洪芳,丁雪梅.外差激光干涉检偏器旋转误差对非线性误差的影响［J］.中国激光,2005,32(9):1281－1285.
2011, Vol. 32 
