Abstract Based on the principle of confocal microscopy,the parallel astigmatic confocal optics system is uesd to detecting the 3-D surface topography of the micro-structure.The system divided light beam with the micro-optic components to realize the parallel detecting.The astigmatic principle is introduced to restrain the interferences coming from the noise and the drift of light source and CCD.By means of searching the “zero” point in the characteristic curve,the in-focal position of the measured object points are extracted.The several key problems are discussed,which deal with the strategies of determining the positions of the astigmatic facula,the optimization and realization of the differential algorithm of the astigmatic principle,the decision of the interval for searching the “zero” point in the characteristic curve,and the fitting method of the characteristic curve etc.A software has been developded based on the research, which can implement extracting the “zero” points in the whole-field characteristic curve speedily and reliably.The research has foundational value for the the micro-structures 3-D profile reconstruction and visualization measurement technology.
LIU Wen-wen,YU Xiao-fen,FAN Hui-min. Extraction of the In-focal Position of the Measured Object Points from the Sequential Images Collected from the Parallel Astigmatic Confocal System[J]. Acta Metrologica Sinica, 2011, 32(6): 485-489.
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2011, Vol. 32 
