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| Study on the Method for Finding Optimum Working Range of Electric Eddy Sensor |
| MIAO En-ming1,2,WANG Xin1,YAN Yan1,YANG Rui-chang1,FEI Ye-tai1 |
1. School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei, Anhui 230009, China
2. State Key Laboratory for Manufacturing Systems Engineering, Xian Jiaotong University, Xian, Shannxi 710049, China |
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Abstract Electric eddy sensor is widely used in industry because of its non-contact measurement and strong anti-interference.However,its accuracy is difficult to reach the level of a few micron.Interval optimization judgment principles is proposed on the bases of the accuracy analysis theory and the error correction technology,including “minimum interval number” principle and “maximum interval ranges” principle,to determine the optimal working ranges of electric eddy sensor and improve the sensor measurement accuracy. The above principles is applied to the commercial electric eddy sensor to obtain the precision promotion,the result shows that the original accuracy of ±10μm error is improved to ±4μm error in the best working range of eddy current sensor.
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［1］强锡富.传感器［M］. 第3版.北京:机械工业出版社,2001.
［2］丁天怀,陈祥林. 电涡流传感器阵列测试技术［J］.测试技术学报,2006,20（1）:1-5.
［3］方秋华,田新启,茅佩.涡流传感器温漂补偿［J］.东南大学学报,1995, 25(5): 47-51.
［4］丛华,张德魁,赵鸿宾.电涡流传感器温度稳定性研究［J］.清华大学学报(自然科学版),1999, 39(10):65-68.
［5］韩韬,施文康,张玉林.源于温度的电涡流传感器交叉敏感的补偿［J］.仪表技术与传感器,2000,(2):10-12.
［6］樊树江,吴峻,杨光,等.电涡流传感器温度漂移分析及补偿实现［J］.传感技术学报,2004,17(3):427-430
［7］费业泰.误差理论与数据处理［M］. 第5版.北京:机械工业出版社,2004.
［8］曹青松,周继惠. 基于电涡流的金属种类识别技术理论与实验研究［J］.仪器仪表学报,2007,28(9):1718-1722. |
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2011, Vol. 32 
