Abstract A large range self-sensing AFM measurement system based on dual feedback measurement model was designed.The purpose is to improve the AFM measurement range.The self-sensing AFM system has two feedback loops:one is composed by piezoelectric ceramic transformer (PZT) and AFM measurement head. The fast dynamic response of the PZT displacement platform can characterize high frequency information of the sample surface; another loop is PZT displacement platform and the nano measuring machine (NMM) feedback controller. The PZT displacement stage position signal controls the NMM movement, and NMM millimeter z direction measurement range makes wide variation range low frequency contour information of the samples easily be characterized.By the system,flat samples and one-dimensional lattice are measured by experiments,the experimental results show that using dual feedback AFM measurement system can effectively characterize the sample frequency contour information and surface high frequency information,measurement range can reach millimeter level,the longitudinal resolution reaches nanometer level and the measurement repeatability is good.
GUO Tong,WANG Si-ming,WANG Long-long, et al. Large Range Self-sensing AFM Measurement System Based on Dual Feedback Measurement Model[J]. Acta Metrologica Sinica, 2012, 33(5): 385-390.
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2012, Vol. 33 
