Acta Metrologica Sinica  2012, Vol. 33 Issue (5): 385-390    DOI: 10.3969/j.issn.1000-1158.2012.05.01
Current Issue | Archive | Adv Search |
Large Range Self-sensing AFM Measurement System Based on Dual Feedback Measurement Model
GUO Tong,WANG Si-ming,WANG Long-long,CHEN Jin-ping,FU Xing,HU Xiao-tang
State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China
Download: PDF (3221 KB)   HTML (1 KB) 
Export: BibTeX | EndNote (RIS)      
Abstract  A large range self-sensing AFM measurement system based on dual feedback measurement model was designed.The purpose is to improve the AFM measurement range.The self-sensing AFM system has two feedback loops:one is composed by piezoelectric ceramic transformer (PZT) and AFM measurement head. The fast dynamic response of the PZT displacement platform can characterize high frequency information of the sample surface; another loop is PZT displacement platform and the nano measuring machine (NMM) feedback controller. The PZT displacement stage position signal controls the NMM movement, and NMM millimeter z direction measurement range makes wide variation range low frequency contour information of the samples easily be characterized.By the system,flat samples and one-dimensional lattice are measured by experiments,the experimental results show that using dual feedback AFM measurement system can effectively characterize the sample frequency contour information and surface high frequency information,measurement range can reach millimeter level,the longitudinal resolution reaches nanometer level and the measurement repeatability is good.
Key wordsAFM head      Dual-feedback measurement      Piezoelectric ceramic transformer (PZT)      Nanometer positioning stage     
PACS:  TB92  
Service
E-mail this article
Add to my bookshelf
Add to citation manager
E-mail Alert
RSS
Articles by authors
GUO Tong
WANG Si-ming
WANG Long-long
CHEN Jin-ping
FU Xing
HU Xiao-tang
Cite this article:   
GUO Tong,WANG Si-ming,WANG Long-long, et al. Large Range Self-sensing AFM Measurement System Based on Dual Feedback Measurement Model[J]. Acta Metrologica Sinica, 2012, 33(5): 385-390.
URL:  
http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2012.05.01     OR     http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2012/V33/I5/385
Copyright © Editorial Board of Acta Metrologica Sinica
Supported by:Beijing Magtech