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| Measurement Error Analysis of Novel Homodyne Laser Interferometer |
| HE Wu-guang,WANG Bao-ting,YANG Chun-ping,KANG Mei-ling,WU Jian |
| School of Opto-Electronic Information, University of Electronic Science and Technology of China, Chengdu, Sichuan 610054, China |
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Abstract The measurement principle of novel homodyne laser interferometer is described.The measurement errors of the interferometer caused by fringe width,laser intensity and speckle effect are studied through experiment and theoretical analysis.The results show that the fringe width has little influence on the measured values of the amplitude,and the measurement error is 0.5%.The amplitude measurement error caused by laser intensity changes is 0.5%,and less light will increase measurement error.The amplitude measurement error caused by speckle effect depends on lens parameters,and the measurement error is 0.4%.The novel homodyne laser interferometer can effectively reduce the requirement of the measurement environment in the vibration system.
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2012, Vol. 33 
