2 m激光干涉测长基准装置

doi:10.3969/j.issn.1000-1158.2012.03.01

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Abstract The components and operation principle of 2m length measurement primary standard with laser interferometer is described.On the basis of the line space measurement, two localizing methods are studied for the multifunction applications of length measurement, the measures used to make sure nanometer accuracy are also described.Two opto-electronic microscopes symmetrically mounted are used for synchronously measuring;it can realize 2 m line space measurement with distance length extension between two microscopes.The system has the function of uniform position generating,so it can trigger displacement sensor for dynamic calibration and other applications.For measuring high quality of line scale,the minimum standard deviation of localization of one measurement of the line with good shape may be less than 10nm,the expanded measurement uncertainty is U=(20+40 L) nm （k=2）.

Key words： Metrology Interference length measurement primary standard;Length quantity tracing Multi-function length measurement Double optoelectronics microscope

PACS:

TB921

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	Articles by authors
	YE Xiao-you1
	GAO Hong-tang
	SUN Shuang-hua
	ZOU Ling-ding
	SHEN Xue-ping
	GAN Xiao-chuan
	CHANG Hai-tao
	ZHANG Xiao

Cite this article:

YE Xiao-you1,GAO Hong-tang,SUN Shuang-hua, et al. The Establishment of 2m Length Measurement Primary Standard[J]. Acta Metrologica Sinica, 2012, 33(3): 193-197.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2012.03.01 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2012/V33/I3/193

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