计量型紫外显微镜微纳米线宽测量技术的研究

doi:10.3969/j.issn.1000-1158.2015.06.04

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Abstract The micro-nano linewidth measurement technology on metrological ultraviolet microscope is that photovoltaic effect of photomultiplier tubes is used to convert the optical signal to electric signal and extract the outline of linewidth by the subsequent signal acquisition circuit. Using some precision positioning device,such as laser interferometer, a linewidth measurement system is builded to measure a standard sample which the linewidth is 3 μm. The linewidth measurement result is 3.025 μm, differ with nominal value 25 μm. Experiment shows that the method can accurately obtain the border of the linewidth , it can achieve accurate measurement of linewidth.

Key words： metrology micro-nano linewidth measurement metrological utraviolet microscope photomultiplier tubes

Received: 09 February 2015 Published: 20 October 2015

PACS:

TB921

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	Articles by authors
	YIN Chuan-xiang
	GAO Si-tian
	ZHAO Xian-yun
	LI Qi
	SHI Yu-shu
	LI Wei
	LU Rong-sheng

Cite this article:

YIN Chuan-xiang,GAO Si-tian,ZHAO Xian-yun, et al. The Research of Micro-Nano Linewidth Measurement Technology on Metrological Ultraviolet Microscope[J]. Acta Metrologica Sinica, 2015, 36(6): 575-578.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2015.06.04 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2015/V36/I6/575

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