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| Research on Abbe Error Elimination Method for Large length Laser measurement |
| MIAO Dong-jing,LI Jian-shuang,LI lian-fu,HE Ming-zhao,DENG Xiang-rui, JIANG Yuan-lin,KANG Yao,ZHANG Jing-yan |
| National Institute of Metrology, Beijing 100029, China |
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Abstract To eliminate the Abbe error in large length laser measurement, an algorithm which based on three independent laser interferometers is proposed. The mounting positions of three interferometers can be arranged in any triangle. By using the length data measured from the three interferometers, and with the geometric relationship between the mounting positions of the instrument to be calibrated and the three interferometers, a virtual interferometer which has a common path with the calibrated instrument is constructed, then the length measuring formula is derived. This method has no special requirement respect to the mounting positions of the three interferometers, so it is very easy to implement in practice. To verify the effectiveness of the algorithm, relying on the indoor 80 meters large length standard measurement device, by changing the mounting position of the calibrated instrument, 3 different experiments are carried out within 45 m measurement range. As the experiment indicates that after eliminating the Abbe error, the maximum of the other remaining error is only 1.10 μm, the result show that the proposed algorithm can eliminate the Abbe error effectively.
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Received: 25 March 2015
Published: 20 October 2015
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2015, Vol. 36 
