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| The Build of Two-dimensional Nano-displacement Measure System and Experiment Research |
| ZHAO Xian-yun1,GAO Si-tian2,LI Qi2,LU Rong-sheng1 |
1.Hefei University of Technology, Hefei, Anhui 230009, China
2.National Institute of Metrology, Beijing 100029, China |
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Abstract A two-dimensional nanometer displacements using piezoelectric ceramic (PZT) to drive overlay of flexure hinge mechanism is developed. The structure of displacement system is introduced and the job of displacement stiffness is analyzed. The theoretical and simulation result error is below 6.3%. A laser interferometer based on the principles of linear interferometer measurement system is constructed, and the layout and displacement measurement principle of the measurement system is described.Then the nanometer displacement itinerary and location accuracy is measured. The results show that within the trips of 100 μm, the x axis and y axis of tests displacement is 99.6 μm and 97.7 μm. The sources of error of the test system is analyzed and the uncertainty of the measurement system is assesed, and the combined standard uncertainty of measurement system of the x axis and the y axis is 10.04 nm and 13.93 nm.
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Received: 08 June 2015
Published: 20 October 2015
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2015, Vol. 36 
