|
|
|
| Angle Vibration Calibration Technology Research by Diffraction Grating Heterodyne Laser Interferometry |
| YU Mei1,LIU Ai-dong1,HE Wen2,YANG Li-feng1,ZUO Ai-bin1,HU Hong-bo1 |
1. National Institute of Metrology, Beijing 100029, China
2. Zhejiang University, Hangzhou, Zhejiang 310027, China |
|
|
|
|
Abstract As in all areas of rotational angular vibration (angular acceleration and angular velocity and angular displacement) measurement increase in demand, research and the establishment of the angular acceleration national primary standard device to solve all kinds of rotation angle vibration sensors and measuring instruments quantity traceability problem is imminent. Based on the analysis of domestic and foreign research present situation, the steady state sine angle vibration excitation system, laser interference measurement system and the data processing technology of angular acceleration absolute calibration method was discussed; And the technical difficulties in development of the high precision rotation angle vibration excitation system and sine-phase diffraction grating disc are proposed.
|
|
Received: 10 October 2014
|
|
|
|
|
|
［1］吴校生, 陈文元. 角加速度计发展综述［J］. 中国惯性技术学报, 2007, 15(4):458-463.
［2］彭军, 何群, 孙丰甲. 动态角运动校准技术综述［J］. 计测技术, 2008, 28(5):1-4.
［3］ISO 16063—15:2006,Methods for the calibration of vibration and shock transducers—Part 15: Primary angular vibration calibration by laser interferometry ［S］.
［4］Cheug W S, Park P M, Kwon H S, et al. Development of electro-dynamic angular exciter for calibration of angular vibration pickups［C］//37th International Congress and Exposition on Noise Control Engineering, Shanghai, China:2008.
［5］Tubner A, von Martens H J. Measurement of angular acceleration, angular velocities and rotation angles by grating interferometry ［J］. Measurement, 1998, 24:21-32.
［6］Tubner A, von Martens H J. Diffraction grating interferometer for the accurate measurement of rotational quantities ［J］. Measurement, 1995, 16:71-80.
［7］Tubner A, von Martens H J. Development of special diffraction grating interferometers to realize and disseminate the unit of angular acceleration ［J］. Proc SPIE, 1996, 2868:438-448.
［8］ISO 16063—11:1999, Methods for the calibration of vibration and shock transducers—Part 11: Primary vibration calibration by laser interferometry ［S］.
［9］于梅, 孙桥. 外差式激光干涉仪应用于正弦直线和旋转振动测量技术的研究［J］. 计量学报, 2005, 26(3):237-241.
［10］于梅, 孙桥, 冯源, 等. 正弦逼近法振动传感器幅相特性测量技术的研究［J］. 计量学报, 2004, 25(4):344-348.
［11］于梅, 左爱斌, 孙桥,等. 2~50kHz高频振动幅值和相位基准的研究［J］. 计量学报, 2008, 29(3):216-221. |
|
|
|
2015, Vol. 36 
