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| Development of a High Precision Constant-temperature Chamber for Micro-nanometric CMM |
| FENG Jian1,LI Rui-jun1,HE Ya-xiong1,FAN Kuang-chao1,2 |
1. School of Instr Sci & Opto-electric Engineering, Hefei University of Technology, Hefei, Anhui 230009, China;
2. Department of Mechanical Engineering, Taiwan University, Taipei 10617,China |
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Abstract The spacious constant-temperature room and the separated constant-temperature chambers can’t meet the requirement of micro-nanometric CMM because of low precision and vibration seperately. A high precision constant-temperature chamber based on the natural convection principle is developed. The walls of the custom-designed chamber is made of hollow acrylic upon which a lightweight thin vacuum insulation plate with ultra-low thermal conductivity coefficient is adhered. The temperature value of the instrument measuring point is taken as the feedback signal. Nine thermoelectric coolers used to cool the air inside the chamber are arranged on the ceiling of the chamber uniformly. The down flowing cool air and the up flowing hot air forms natural convection. The program of the high accuracy temperature-controlled system is developed using LabVIEW and MATLAB software. The experimental results show that the system steady-state error is 0.0032 ℃ on average, and the variation range is less than 0.03 ℃ when the set temperature is 20 ℃. It is superior to a Class I standard room. The new type constant-temperature chamber has the advantages of low cost, low energy consumption and no vibration.
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2015, Vol. 36 
