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| Research on Calibration Methods of Measurement Noise and Residual Flatness of Coherence Scanning Microscope |
| SHEN Fei1,SHI Yu-shu1,2,CHEN Si-wen2,WANG Xing-wang3,LI Shi1,LI Qi1,LI Wei1,GAO Si-tian1 |
1.National Institute of Metrology, Beijing 100029, China;
2.State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China;
3.College of Mechanical and Electrical Engineering, Beijing University of Chemical Technology, Beijing 100029,China |
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Abstract The measurement principle of Coherence scanning microscope (CSM) is described and solution to calibrate the measurement noise is and residual flatness characteristics of CSM by using a calibratedsuper-smooth silicon carbide disk as the standard surface is proposed.To obtain the measurement noise, the topography data of the standard surface is measured twice at the same position in quick succession and then the data is disposed with subtraction technique.The residual flatness is acquired by threshold method applied to deal with topography data of repeated measurements at different positions on the standard surface.The calibration experiment has been conducted on the CSM of National Institute of Metrology based on the method proposed.The result shows that the measurement noise could be calibrated using subtraction method one time and the residual flatness could be calibrated through more than ten times of measurements at different positions on the standard surface and then calculating the average topography of the measurement results.
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2014, Vol. 35 
