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| Laser Diffraction Angle Measuring Instrument |
| SHAO Hong-wei1,LI Ping1,LAI Zhan1,CUI Jian-jun1,2 |
1. National Institute of Metrology, Beijing 100029, China;
2. State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China |
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Abstract A new method of laser diffraction for measuring the angle is introduced. The sensitively and precision of the laser diffraction angle measuring instrument is much better than light rotary encoder angle measuring instrument, light dividing angle measuring instrument and light grating angle measuring instrument. Especially the resolution of the laser diffraction measuring angle instrument is improved over 20 times.
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［1］《角度计量》编写组. 角度计量［M］. 北京:中国标准出版社,1984.
［2］殷纯永. 现代干涉测量技术［M］. 天津: 天津大学出版社, 1999年.
［3］http://wenku.baidu.com/view/4f06ac659b66487c1c746dd.html. |
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2014, Vol. 35 
