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| An Improvement on the Method for Measuring the Universal Tool Microscope |
| LIANG Jian-tong,CHANG Qing |
| The Ministry of Industry and Information Technology Institute of Electronics Fifth,Guangdong Guangzhou 510610, China |
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Abstract Universal tool microscope image measurement is a widely used measurement means, however the measurement accuracy of this method is subject to the corresponding plane coordinate system moving rail straightness errors and scale characterization error. So when the system is not designed in consistant with the Abbe principle, its straightness error motion guide will bring Abbe error not be eliminated. Therefore, reasonable structure design of the measuring system helps to improve the measurement accuracy universal tool microscope, and through the measurement method uncertainty evaluation, obtains verification theory. Through the application of laser interferometer on universal tool microscope, outlining an universal tool microscope method can improve the measurement accuracy.
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2014, Vol. 35 
