基于表面形貌测量仪的小尺寸零件直线度测量方法

doi:10.3969/j.issn.1000-1158.2014.z1.017

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Abstract Small parts are the main objects of straightness measurement study.Mahr's latest high-precision surface contour measuring instrument, MarSurf LD 260, is used to measure straightness of tungsten film. The measurement result is compared with that of the conventional method. The En value calculation method is used to evaluate the comparison result and the comparison result is E_n =0.40 which shows the measurement method is with high accuracy and it is feasible and easy to use.

Key words： Metrology Straightness Surface contour measuring instrument Small parts

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	Articles by authors
	TANG Dong-mei
	ZENG Yan-hua
	FU Yun-xia
	ZHANG Bo

Cite this article:

TANG Dong-mei,ZENG Yan-hua,FU Yun-xia, et al. Small Parts Straightness Measurement Based on Surface Contour Measuring Instrument[J]. Acta Metrologica Sinica, 2014, 35(z1): 76-78.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2014.z1.017 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2014/V35/Iz1/76

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