|
|
|
| Research on Long Gauge Block Interferometer |
| ZHANG Xu-dong,LIU Xiang-bin,WU Yue-yan |
| National Institute of Metrology, Beijing 100029, China |
|
|
|
|
Abstract A long gauge block interferometer for 125~1000 mm used multi-wavelengths interferometry is developed.Three stable lasers, 633nm, 543nm and 612nm, are introduced into interferometer by using a single mode fiber and used as measuring lights.The gauge block length is measured by the method of exact fractions, and five step phase stepping method is used for the calculation of fractions of interference fringes.In the chamber, the refractive index of air is calculated by modified Edlen formula to correct wavelengths.The uncertainty for gauge block measurement is U=0.02 μm+ 0.1×10- 6 L(k=3)。
|
|
|
|
|
|
［1］邵宏伟,刘香斌,王雁,等.一等大量块(125～1 000 mm)检定装置［J］.计量学报,2004,25(3): 198-202.
［2］Andrew John Lewis. Absolute length measurement using multiple-wavelength phase-stepping interferometry［D］.London:University of London, 1993.
［3］Born M, Wolf E. Principles of Optics［M］.New York:Pergamon Press,1980.
［4］Hariharan P. Basics of Interferometry［M］.New York:Academic Press,1992.
［5］张旭东,刘香斌,党爱华,等. 基于热电偶的温度测量系统的不确定度［J］. 计量学报,2006,27(3A): 157-159.
［6］Edlen B. The refractive index of air［J］. Metrologia, 1966,2(2): 71-80.
［7］Birch K P, Downs M J. An Updated Edlen Equation for the Refractive Index of Air［J］. Metrologia,1993,30(3): 155-162.
［8］Birch K P, Downs M J. Correction to the updated Edlén equation for the refractive index of air［J］. Metrologia,1994,31(4): 315-316.
［9］朱日宏,陈磊,王青,等.移相干涉测量术及其应用［J］.应用光学,2006,27(2): 85-88.
［10］Herraez M A,Burton D R, Lalor M J,et al. Fast two-dimensional phase-unwrapping algorithm based on sorting by reliability following a noncontinuous path［J］. Optical Society of America, 2002,41(35): 7437-7444. |
|
|
|
2014, Vol. 35 
