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| Study on the Weighing Tracing Method of Thickness for the Self-supporting Metal Foil |
| ZHU Xiao-ping,DU Hua,WANG Wei-chen,CUI Jing-yuan,WANG Kai,XU Zhen-jie |
| National Institute of Metrology, Beijing 100029 |
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Abstract To use the mathematical relationship among three quantities of object density, weight and volume, the weighing method measurement model of self-supporting metal foils thickness is built. According to an object density is a constant quantity, the measuring method of film thickness is presented basing on the measured values of weight and area, and its density constant. The measuring method was realized and experimented using three kinds of foils which has approximate thickness but different weight of the copper films. After the weight and area were measured, the film thickness is calculated. The thickness result is analyzed and compared with X-ray fluorescence analysis instruments and other conventional mechanical machine measuring result. Through the evaluation of uncertainty, the weighing method is verified of reliability, practicability and accuracy. It is tested and verified that weighting method is a high precision measurement and well tracing method of self-supporting metal film thickness, the uncertainty of measurement is not more than 0.3% of the thickness.
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2014, Vol. 35 
