二维光学标准器校准影像测量仪方法研究

doi:10.3969/j.issn.1000-1158.2014.z1.04

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Abstract According to JJF1318-2011 Calibration Specification for Imaging Probe Measuring Machines, the image measuring instrument calibration parameters and calibration method is analyzed. The traceability system of the image measuring instrument is introduced. A variety of specifications of the two-dimensional optical standard are designed, and the calibration procedures are expounded in detail. Length measurement error is tested by two-dimensional grid photomask and measurement data is analyzed. The measurement uncertainty is evaluated carefully, including its sources and values.

Key words： Metrology Two-dimensional optical standard Probing error Length measurement error Photomask Measurement uncertainty

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	Articles by authors
	SUN Shuang-hua
	XUE Zi
	WANG He-yan

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SUN Shuang-hua,XUE Zi,WANG He-yan. Image Measuring Instrument Calibration with Two-dimensional Optical Standard[J]. Acta Metrologica Sinica, 2014, 35(z1): 14-18.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2014.z1.04 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2014/V35/Iz1/14

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［3］国家质量监督检验检疫总局JJF1318—2011,影像测量仪校准规范［S］.2011.
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