|
|
|
| Dynamic and Static Measurement System for Linear Encoders |
| KANG Yan-hui,HUANG Yang,ZHANG Heng |
| National Institute of Metrology, Beijing 100029, China |
|
|
|
|
Abstract Based on the laser interferometry, and the high speed linear driving and measurement technique, a dynamic and static measurement system for linear encoders is developed. The general structure of the measurement system is described, and the dynamic and static measurement process is introduced. The critical components are also presented in detail, including the linear driving unit and the clamping and adjusting mechanism for linear encoders. The measurement system can measure the dynamic and static performance of linear encoders in the range of 2 m. The experimental result shows that static indication error is better than 0.3μm/m, and the velocity evaluation is up to 180m/min, which can well satisfy the need of high precision measurement of linear encoders.
|
|
|
|
|
|
［1］江晓军, 黄立华, 黄惠杰. 光栅位移测量系统的误差自修正方法研究［J］. 计量学报, 2008, 29(4): 309-312.
［2］林一松, 汤兆红, 区锐相, 等. 数控设备中增量式光栅尺接口模块设计［J］. 工具技术, 2006, 40(3): 126-128.
［3］束小梅, 左勇, 徐晓波, 等. 长光栅测量系统误差修正方法［J］. 计量学报, 2010, 31(6A): 187-190.
［4］徐宗伟, 李龚浩, 兀伟, 等. 滚压印圆柱母光栅的微刻划制造［J］. 纳米技术与精密工程, 2013, 11(6): 473-478.
［5］刘华, 卢振武, 熊峥, 等. 绝对式光栅尺母尺刻划曝光系统［J］. 光学精密工程, 2014, 22(7): 1814-1819.
［6］张迎新, 刘京南, 内田敬久. 差动光栅式精密定位精度的提高［J］. 计量学报, 2006, 27(1): 7-11.
［7］曹向群, 黄维实, 金彤. 光栅计量技术［M］. 杭州: 浙江大学出版社, 1992. |
|
|
|
2014, Vol. 35 
