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| The Preliminary Establishment of Nanometer Standard Metrology System in China |
| GAO Si-tian,SONG Xiao-ping,LI Qi,SHI Yu-shu,LI Wei,REN Ling-ling,LI Shi, WANG He-qun |
| National Institute of Metrology, Beijing 100029, China |
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Abstract The National Institute of Metrology P.R China has preliminarily established our national nanometer standard traceability framework, including: nanometer geometric structure metrology standard device, millimeter range nanometer geometric structure metrology standard device, scanning probe microscope calibration device, scanning electron microscope calibration device and film thickness calibration device. These standard apparatus can calibrate not only the nanometer scale step height, line pitches, linewidth and nano film thickness, but also the scanning probe microscope, scanning electron microscope, etc., which effectively support for the development of semiconductor and NEMS/MEMS industries in China.
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2014, Vol. 35 
