|
|
|
| Accurately Following Measuring Technique for Warpage of Substrate Glass |
| SHAO Wei1,GUO Jun-jie2,CHANG Ting1,LIU Chong1 |
1.Xi’an University of Technology, Xi’an, Shaanxi 710048, China;
2.Xi’an Jiaotong University, Xi’an, Shaanxi 710049, China |
|
|
|
|
Abstract For measuring warpage of large size substrate glass,a generalized minimum variance principle base on real-time adjusting polynomial weights (RAPW_GMV) automatic scanning method is introduced.Its main idea is based on the real-time estimation of the parameters of controlled object and RAPW_GMV output to correction polynomial weights to fulfill the automatic tracking measuring of probe.The experimental results confirm the tracking error of automatic measuring of unknown surface is superior to 0.02mm, and the automatic measuring of substrate glass warpage with fast and high precision is realized.
|
|
|
|
|
|
［1］王军,赵玉军.液晶显示器基板玻璃质量的检测方法［J］. 国外建材科技, 2008, 9(4):58-60.
［2］闫金良.大尺寸0.55mm ITO透明导电膜玻璃的翘曲度［J］.光学技术, 2004, 30(4):406-408.
［3］Casuso I, Kodera N, Le Grimellec C, et al. Contact-mode high resolution high speed atomic force microscopy movies of the purple membrane［J］.Journal Biophysical, 2009, 97(5):1354-1361.
［4］马忠祥,赵军,刘维. 基于随动测量系统的步进电机跟踪精度研究［J］. 计量学报, 2009, 30(5):14-17.
［5］何炳蔚,周小龙.基于可视空间的未知三维物体自动建模视点规划方法研究［J］.仪器仪表学报, 2009, 30(7):1552-1559.
［6］陶永华,伊怡欣,葛芦生.新型PID控制系统及应用［M］.北京:机械工业出版社, 2002, 56-60.
［7］刘爱东,于梅.振动自动校准系统的研究及实现［J］.计量学报, 2009, 30(2):141-143.
［8］谢新民,丁锋.自适应控制系统［M］.北京:清华大学出版社, 2002, 126-130.
［9］叶明,秦大同,刘振军.直流伺服电机驱动的自动离合器控制［J］. 机械设计与研究, 2005, 19(2):35-37.
［10］杨承志,孙棣华,张长胜.系统辨识与自适应控制［M］. 重庆:重庆大学出版社, 2003, 218-226. |
|
|
|
2013, Vol. 34 
