Abstract For measuring warpage of large size substrate glass,a generalized minimum variance principle base on real-time adjusting polynomial weights (RAPW_GMV) automatic scanning method is introduced.Its main idea is based on the real-time estimation of the parameters of controlled object and RAPW_GMV output to correction polynomial weights to fulfill the automatic tracking measuring of probe.The experimental results confirm the tracking error of automatic measuring of unknown surface is superior to 0.02mm, and the automatic measuring of substrate glass warpage with fast and high precision is realized.
2013, Vol. 34 
