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| A Non-contact Trigger Probe Based on DVD Pick-up Head |
| GAO Wei,CHEN Xiao-huai,LI Rui-jun,CHENG Zhen-ying |
| School of Instrument Science and Opto-electric Engineering, Hefei University of Technology, Hefei, Anhui 230009,China |
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Abstract A non-contact trigger probe based on the commercial DVD pick-up head is presented. The focus sensor and the mechanism have been designed and manufactured. Experimental results show that of the resolution of non-contact trigger probe is better than 2 nm and the repeatability reaches 20 nm. The non-contact trigger probe can be used on a micro/nano CMM.
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2014, Vol. 35 
