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| Analysis of the Measurement Comparison Results of On-wafer S-parameters |
| LIU Chen1,GAO Ling1,LUAN Peng1,CHEN Ting2,HUANG Yinglong3,LI Yankui4,JIN Cheng5,ZOU Xiyue6,LU Jing7,CHEN Keyuan8 |
1.The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei 050051,China
2. Beijing Institute of Radio Metrology and Measurement, Beijing 100029, China
3. China Institute of Electronic Technology Standardization, Beijing 100176, China
4. Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
5. The 14th Research Institute of China Electronics Technology Group Corporation,Nanjing, Jiangsu 210013, China
6. Hunan Shibian Communication Technology Co., Ltd., Xiangtan, Hunan 411104, China
7. Huameibo Technology (Beijing) Co., Ltd., Beijing 100097, China
8. Hebei Xiongan Taixin Electronic Technology Co., Ltd., Baoding, Hebei 071799, China |
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Abstract As the leading laboratory, the 13th Research Institute of China Electronics Technology Group Corporation carried out the measurement comparison of on-wafer S-parameters, summarized and analyzed the measurement results of on-wafer S-parameters submitted by the joined laboratories, and evaluated the measurement results of each laboratory with En. Through the measurement comparison of the on-wafer S-parameters, the accuracy and reliability of the transmission of the quantities are ensured, especially the main sources of the measurement uncertainty of the on-chip S-parameters are unified. At the same time, it also provides the industry with a comparison platform for the consistency of on-chip S-parameter measurement.
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Received: 23 January 2024
Published: 26 September 2024
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|
| ［3］ |
郑万红. 计量比对中主导实验室的工作重点和技术难点［J］. 中国检验检测. 2023, 31(4): 50-52.
|
| ［6］ |
陈俊辉. 高频微波探针在片测量校准技术研究［D］. 杭州:浙江大学, 2023.
|
| ［16］ |
丁晨, 乔玉娥, 刘岩, 等. 在片电容测量系统溯源及测量方法研究［J］. 计量学报, 2023, 44(11): 1735-1739.
|
| ［4］ |
王敏. 矢量网络分析仪测量不确定度研究［D］. 南京: 南京航空航天大学. 2020.
|
| ［1］ |
网络分析仪在片测量系统校准规范: JJF(军工)162-2017［S］.
|
| ［5］ |
潘涛. 射频功率器件在片测试研究［D］. 杭州:杭州电子科技大学, 2023.
|
|
HUANG X K. Recent metrology progress for on-wafer microwave measurement systems［J］. Journal of Microwaves, 2020, 36(4): 95-100.
|
| ［11］ |
霍晔, 吴爱华, 王一帮, 等. 在片校准件参数定值方法［J］. 计量学报, 2022, 43(8): 979-983.
|
|
ZHENG W H. Key points and technical difficulties of leading laboratory in measurement comparison［J］. China Inspection Body & Laboratory, 2023, 31(4): 50-52.
|
|
WANG Y B, WU A H, HUO Y, et al. Development of a new method for millimeter-wave intrinsic on-wafer measurements ［J］. Acta Metrologica Sinica, 2022, 43(3): 293-298.
|
| ［8］ |
黄先奎. 在片微波参数测量系统计量技术进展［J］. 微波学报, 2020, 36(4): 95-100.
|
|
WU A H, LOU H Y, LIU C, et al. Methodology for extracting S-parameter of coplanar microwave probe［J］. Journal of Microwaves, 2016, 32(2): 35-38.
|
| ［10］ |
吴爱华, 孙静, 刘晨, 等. 在片S参数测量系统校准技术研究［J］. 宇航计测技术, 2015, 35(5): 11-16.
|
|
WU A H, SUN J, LIU C, et al. Study on the calibration technology of on-wafer S-parameter measurement system［J］. Journal of Astronautic Metrology and Measurement, 2015, 35(5): 11-16.
|
| ［13］ |
王一帮, 吴爱华, 刘晨, 等. 一种对在片测量系统中串扰误差进行修正的新型校准方法［J］. 计量学报, 2021, 42(12): 1553-1558.
|
| ［15］ |
张兆华, 张明辉, 崔凯, 等. 晶圆级异构集成毫米波收发组件测试技术［J］. 现代雷达, 2023, 45(8): 91-96.
|
| ［2］ |
计量比对: JJF 1117-2010［S］.
|
| ［7］ |
王一帮, 吴爱华, 霍晔, 等. 一种用于毫米波器件本征在片S参数校准的新方法［J］. 计量学报, 2022, 43(3): 293-298.
|
| ［9］ |
吴爱华, 楼红英, 刘晨, 等. 提取共面微波探针 S 参数的方法［J］. 微波学报, 2016, 32(2): 35-38.
|
| ［12］ |
霍晔, 吴爱华, 王一帮, 等. 无源器件在片散射参数校准比较方法研究［J］. 计量学报, 2022, 43(3): 299-305.
|
|
WANG Y B, WU A H, LIU C, et al. A novel calibration method at on-wafer measurement system affected by leakage［J］. Acta Metrologica Sinica, 2021, 42(12): 1553-1558.
|
| ［14］ |
殷玉喆, 张旭勤, 高猛, 等. GaAs衬底共面波导S参数标准样片研制［J］. 微波学报, 2017, 33(5): 44-49.
|
|
HUO Y, WU A H, WANG Y B, et al. Method for definition parameters of on-wafer calibration standards［J］. Acta Metrologica Sinica, 2022, 43(8): 979-983.
|
|
HUO Y, WU A H, WANG Y B, et al. Research for calibration comparison method of passive devices on-wafer scattering parameters［J］. Acta Metrologica Sinica, 2022, 43(3): 299-305.
|
|
YIN Y Z, ZHANG X Q, GAO M, et al. Research on GaAs co-planar waveguide S-parameter standard［J］. Journal of Microwaves, 2017, 33(5): 44-49.
|
|
ZHANG Z H, ZHANG M H, CUI K, et al. Testing Technology for Wafer Level Heterogeneous Integration Millimeter-wave Transceiver Module［J］. Modern Radar, 2023, 45(8): 91-96.
|
|
DING C,QIAO Y E,LIU Y, et al. Traceability and Measurement Method for On-wafer Capacitance Test System［J］. Acta Metrologica Sinica, 2023, 44(11): 1735-1739.
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2024, Vol. 45 
