Research of Nonlinearity Error Optimization for Single Frequency Laser Interferometer

doi:10.3969/j.issn.1000-1158.2013.02.06

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Abstract To decrease the influence of the nonlinearity error on accuracy and stability of single-frequency laser interferometer, the factors are researched. Based on the Jones matrix, the optical parameters of the system are expressed. The optimal control adjustment to improve single-frequency laser interferometer is described. Experimental results show that the ordinary adjustment is limited to improve the system accuracy. But the orthogonality of signals, interference fringe contrast and system sensitivity are improved by optimal control adjustment. The interference fringe contrast vimax,o achieve to 0.97, and the four periods of two signals turn into two periods which 1/8 wave plate is revolved.

Key words： Metrology Single frequency laser interferometer Nonlinearity error Optimal control adjustment Interference fringe contrast System sensitivity

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	Articles by authors
	HUANG Lei
	MA Hong
	MA Zhong-huan
	YANG Lu

Cite this article:

HUANG Lei,MA Hong,MA Zhong-huan, et al. Research of Nonlinearity Error Optimization for Single Frequency Laser Interferometer[J]. Acta Metrologica Sinica, 2013, 34(2): 122-127.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2013.02.06 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2013/V34/I2/122

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