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| Spectral Confocal Sensor Multi-Parameter High-Accuracy Calibration |
| YANG Pinhong1,2,TANG Bo1,CUI Jianjun2,4,CHEN Kai2,SONG Peijie3,PENG Lu5 |
1. College of Metrology and Measurement Engineering,China Jiliang University, Hangzhou, Zhejiang 310018, China
2. National Institute of Metrology, Beijing 100029, China;3. Gansu Academy of Metrology, Lanzhou, Gansu 730071, China
4. Tibet Autonomous Region Institute of Metrology and Testing, Lhasa, Xizang 850010, China
5. Reearch Insitute of Highway Ministry of Transport, Beijing 100029, China |
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Abstract Aiming at the problem of lack of calibration device and method for high accuracy spectral confocal sensor, a calibration method based on laser interferometry is proposed and the corresponding calibration device is developed. On the one hand, a wavelength multiples interval measurement method is proposed, by displacement feedback control, the displacement interval is set as an integer multiple of the laser wavelength, so as to reduce the influence of nonlinear error of laser interferometer on measurement. On the other hand, the measuring point correction algorithm is proposed to eliminate the influence of the displacement standard value on the measurement due to the limitation of the positioning accuracy of the calibration device. Experimental results demonstrate that within the measurement range of 0～100μm, the indication error is ±23nm, repeatability is 5nm, and the expanded uncertainty of the indication error measurement results is U2=7.0nm (k=2). The uncertainty of indication error measurement results for the constructed calibration device within the measurement range of 0～50mm is U1=3.0nm+2×10-7L (k=2).
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Received: 04 August 2023
Published: 25 March 2024
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2024, Vol. 45 
