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| Dynamic Calibration Device Based on Synchronous Measurement of Laser Interferometer |
| REN Yu,HU Xiaolei,GUO Zhimin,FU Yunxia,ZHANG Feng |
| Shanghai Institute of Measurement and Testing Technology, Shanghai 201203, China |
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Abstract To realize the instantaneous dynamic test of time-varying geometry, a dynamic calibration device based on synchronous measurement of laser interferometer was developed. The device used linear motion rail as motion generator, laser interferometer as length standard, synchronous trigger based on GNSS tame clock to measure synchronously and ensure accurate and stable time, and dynamic calibration software to achieve control integration. By comprehensively analyzing the factors such as length measurement and time delay, the measurement uncertainty of the length indication of the device was Q［1.8μm, 3×10-7L］(k=2). Two experiments proved the rationality of uncertainty evaluation and the feasibility of the device in the instantaneous dynamic accuracy test of laser tracker.
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Received: 27 July 2023
Published: 25 March 2024
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2024, Vol. 45 
