触针式表面形貌测量仪探针几何特性引起的失真机理与识别方法

doi:10.3969/j.issn.1000-1158.2024.03.04

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Abstract Contact surface topography measuring instruments are commonly utilized for assessing variables such as surface roughness, geometric shapes, and waviness. Nevertheless, the convolution effect produced by the probe’s interaction with the test surface can result in measurement distortion. An analysis is performed on the distortion mechanism influenced by the geometric characteristics of the probe, classifying distortions based on their properties into conventional and complex distortions. In response to the distortion phenomena caused by the compound effects of a spherical probe tip and cone angles, a multimodal recognition method for complex distortion is proposed. Experimental outcomes indicate that compared to the limitations of single-mode recognition of conventional distortions by the topography measuring instrument, the proposed method could effectively identify complex distortions present in topography measurement results. Moreover, it offers a credible interpretation of the measurement results, providing a novel strategy for the accurate identification and correction of distorted data within these results.

Key words： geometric metrology probe geometry characteristic distortion surface topography multimodal recognition

Received: 07 October 2023 Published: 25 March 2024

PACS:

TB92

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	Articles by authors
	WANG Kang
	PI Lei
	ZHANG Shu
	ZHANG Shihan
	SHI Yushu

Cite this article:

WANG Kang,PI Lei,ZHANG Shu, et al. Mechanism and Identification Method of Distortion Caused by the Geometry Characteristic of Probe in Contact Surface Topography Measuring Instrument[J]. Acta Metrologica Sinica, 2024, 45(3): 325-331.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2024.03.04 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2024/V45/I3/325

［6］	施玉书, 连笑怡, 王艺瑄, 等. AFM扫描过程的模拟及针尖形状反求［J］. 计量学报, 2019, 40(2): 177-182.
［2］	史舟淼, 张树, 施玉书, 等. 低噪声触针式表面粗糙度探测系统及测量不确定度分析［J］. 计量学报, 2022, 43(9): 1122-1127.
［3］	何宝凤, 丁思源, 魏翠娥, 等. 三维表面粗糙度测量方法综述［J］. 光学精密工程, 2019, 27(1): 78-93.
［4］	卜祥鹏, 张树, 皮磊, 等. 表面粗糙度国际比对自动测量系统关键技术研究［J］. 计量学报, 2022, 43(7): 844-850.
［5］	产品几何技术规范(GPS) 表面结构轮廓法接触(触针)式仪器的标称特性:GB/T6062—2009 ［S］.
［1］	孙艳玲, 常素萍. 接触式表面轮廓测量的非线性误差分析与补偿［J］. 计量学报, 2016, 37 (6): 563-566.
	SUN Y L, CHANG S P. Analysis and Compensation of the Nonlinear Error Based on Contact Surface Profile Measurement ［J］. Acta Metrologica Sinica, 2016, 37 (6): 563-566.
	SHI Z M, ZHANG S, SHI Y S, et al. Evaluation of the Uncertainty for the Measurement of Surface Roughness by Low-noise Probing System ［J］. Acta Metrologica Sinica, 2022, 43(9): 1122-1127.
	HE B F, DING S Y, WEI C E, et al. Review of Measurement Methods for Areal Surface Roughness ［J］. Optics and Precision Engineering, 2019, 27(1): 78-93.
	BU X P, ZHANG S, PI L, et al. Research on the Key Technology of the Automatic Measurement System for Surface Roughness International Comparison ［J］. Acta Metrologica Sinica, 2022, 43(7): 844-850.
	SHI Y S, LIAN X Y, WANG Y X, et al. Simiulation of AFM Scanning Process and Tip Shape Estimation ［J］. Acta Metrologica Sinica, 2019, 40(2): 177-182.
［7］	TIAN A L, LIU X, CHETWYND D G, et al. Stylus contact on short wavelength random surfaces: a simulation study ［J］. Measurement Science and Technology, 2007, 18(6): 1694-1697.
［9］	VORBURGER T V, ZHENG A, RENEGAR T B, et al. An iterative algorithm for calculating stylus radius unambiguously ［J］.Journal of Physics: Conference Series,2011, 311(1): 012029.
［11］	PARK J, KWON K, CHO N. Development of a coordinate measuring machine (CMM) touch probe using a multi-axis force sensor ［J］. Measurement Science and Technology, 2006, 17(9): 2380-2383.
	LIU J, GU K, LI M Z, et al. Calibration Method for Depth Measurement of Nano/microstructure in Scanning Probe Microscopy ［J］. Acta Metrologica Sinica, 2019, 40 (4): 549-556.
［13］	CANET F J, CORONADO E, FORMENT A A, et al. Correction of the tip convolution effects in the imaging of nanostructures studied through scanning force microscopy ［J］. Nanotechnology, 2014, 25(39): 395703.
［15］	LAHAT D, ADALI T, JUTTEN C. Multimodal data fusion: an overview of methods, challenges, and prospects ［J］. Proceedings of the IEEE, 2015, 103(9): 1449-1477.
［16］	TURK M. Multimodal interaction: A review ［J］. Pattern recognition letters, 2014, 36: 189-195.
	WANG Z Y, FU J H, MENG H. Modified Least Square Reference Line for Surface Roughness Evaluation ［J］. Acta Metrologica Sinica, 2008, 29 (3): 203-206.
	XU J X, YOU Q. Uncertainty Calculation for Arbitrary Order Polynomial Least-square Fitting and Analysis of the Best Fitting Order ［J］. Acta Metrologica Sinica, 2020, 41(3): 388-392.
［8］	CHEN S G, WU J Y. Estimating normal vectors and curvatures by centroid weights ［J］. Computer Aided Geometric Design, 2004, 21(5): 447-458.
［10］	LEE D H. 3-Dimensional profile distortion measured by stylus type surface profilometer ［J］. Measurement, 2013, 46(1): 803-814.11.
［12］	刘俭, 谷康, 李梦周, 等. 扫描探针显微镜下微纳结构深度测量的校准方法［J］. 计量学报, 2019, 40 (4): 549-556.
［14］	CHEN C C A, LIN C C, CHEN R. Stylus measurement and error analysis of large slope angle lens ［C］// Advanced Manfacture: Focusing on New and Emerging Technologies. 2008: 312-323.
［17］	王中宇, 付继华, 孟浩. 二维表面粗糙度最小二乘评定基准线的改进［J］. 计量学报, 2008, 29 (3): 203-206.
［18］	许金鑫, 由强. 任意阶次多项式最小二乘拟合不确定度计算方法与最佳拟合阶次分析［J］. 计量学报, 2020, 41(3): 388-392.
［19］	WU J J. Spectral analysis for the effects of stylus tip curvature on measuring isotropic rough surfaces ［J］. Measurement Science and Technology, 2002, 13(5): 720-723.