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| Design and Control of a New Long-Stroke Vertical Nano-Motion Stage |
| ZHANG Fan,HUANG Qiangxian,CHENG Rongjun,ZHANG Liansheng,LI Hongli,LI Ruijun |
| Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Opto-electronic Engineering, Hefei University of Technology, Hefei,Anhui 230009, China |
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Abstract The design and stable control of the stage are key factors in large stroke high-precision vertical motion.Therefore,a novel motion stage with a balancing mechanism is proposed to achieve large stroke nano stable motion in the vertical direction.The characteristics of the stage are that the N331 piezoelectric linear motor is independently driven,suspended through the air static guide rail,and the Z-axis balance system is designed to reduce the motor driving load.A stepping mode is used to realize the large travel actuation,and an analog mode is adopted to implement micro-displacement actuation.This strategy can be used to achieve fast and precise driving of 100mm.In addition,the Z-stage can achieve compound control of the nanostepping and analog modes.The positioning fluctuation can be limited to±9nm within the full range of 100mm.According to the verification experiments,the stage can be suitable for driving and control tasks in coordinate measuring machines (CMMs),microlithography,and micromachining applications.
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Received: 13 September 2023
Published: 25 March 2024
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| Fund:National Key Research and Development Program of China;National Natural Science Foundation of China |
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2024, Vol. 45 
