基于空间光调制器的激光光束宽度调节装置

doi:10.3969/j.issn.1000-1158.2024.02.08

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Abstract In order to meet the traceability requirements of the laser industry for the beam width measuring device and improve the laser beam width calibration capability, a device which the laser beam width is continuously adjustable based on spatial light modulator (SLM) has been designed for the calibration of different beam widths of lasers in the 400~700nm wavelength range, which is used for the calibration of beam quality analyzers or laser spot measurement instruments. The experimental results show that the device is continuously adjustable in the width range of 0.1~5.0mm. This device utilizes the strong ability of partially coherent beams to resist environmental disturbances, its short-term stability is 99.5% and long-term stability is 99.1%, better than the short-term stability and long-term stability of reference laser which is 96.8% and 96.3% respectively. In addition, based on the superior beam shaping ability of SLM, the device can output the irregular beam to Gaussian beam.

Key words： optical metrology laser beam width;spatial light modulator continuously adjustable;beam shaping;partially coherent beam stability

Received: 16 February 2023 Published: 21 February 2024

PACS:

TB96

Fund:National Key R&D Program of China

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	Articles by authors
	MI Chenkun
	YANG Zhaohui
	LIU Hongxin
	WANG Fei

Cite this article:

MI Chenkun,YANG Zhaohui,LIU Hongxin, et al. Adjustable Laser Beam Width Device Based on Spatial Light Modulator[J]. Acta Metrologica Sinica, 2024, 45(2): 194-198.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2024.02.08 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2024/V45/I2/194

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