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| Design and Measurement of Weak Current Heating Structure Based on Magnetron Sputtering |
| YAN Xiao-yan,LIANG Shi-shuo,LIU Yu-qi,GUO Qi |
| North University of China, Taiyuan, Shanxi 030051, China |
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Abstract In high-precision atomic magnetometer, because the temperature of the atomic gas chamber directly affects the polarization of the electron spin of alkali metal, and then affects the sensitivity of the magnetometer, precisely controlling the temperature of the atomic gas chamber is the key to realize the application of high-precision atomic magnetometer. Based on the principle of electric heating and the principle of back-folding magnetic cancellation,the micro weak magnetic electric heating chips with single-layer and double-layer structures are designed and completed through the derivation of Biot-Savart law and simplified model simulation. By measuring the magnetic flux density modes at different distances and different current conditions on the surface of single and double-layer chips,the suppression effect of the single and double-layer coil structure on the magnetic field generated by the current is verified. The double-layer heating chip is about 6.9 times higher than the electric heating remanence suppression characteristics of the folding chip.The magnetic field change rate at 5mm from the chip is only 72.2nT/A.By comparing the heating effect of the same working current at the same time,it can be found that the double-layer has a faster temperature response.
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Received: 10 April 2023
Published: 21 September 2023
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2023, Vol. 44 
