|
|
|
| Application of Line Laser in Constructing Optical Mirror Testing Path |
| JI Bo1,2,XU Chen1,2,TANG Jin1,2 |
| 1.Nanjing Institute of Astronomical Optics & Technology, Chinese Academy of Sciences, Nanjing, Jiangsu 210042, China 2.CAS Key Laboratory of Astronomical Optics & Technology, Nanjing, Jiangsu 210042,China |
|
|
|
|
Abstract To investigate the application of line laser in the construction of the optical testing path which based on its ability to no-contract output continuous reference datum, the assistant role of the line laser in testing different types of mirrors has been studied, such as plane mirror testing, spherical mirror testing, Ritchey-Common testing, aspheric mirror testing etc, and the operational guidance in the adjustment has been proposed, that scientifically and systematically demonstrate its special advantages in spatial position and optical axis correction, also the interference of its error to the testing and the corresponding correction measures has been discussed, then verified the advantages by experimental comparison with the traditional equipment. The results show that the line laser can replace the traditional auxiliary alignment equipment and methods, and it has good adaptability for different types of optical mirror testing.
|
|
Received: 13 December 2022
Published: 22 August 2023
|
|
|
|
|
|
| ［5］ |
唐小莉, 何平安, 余梅霜. 激光标线仪误差分析［J］. 应用激光, 2005, 25(6): 384-386.
|
| ［7］ |
李德培. 天文光学非球面技术和系统调整［M］. 北京:中国科学技术出版社, 2017.
|
| ［9］ |
罗倩, 吴时彬, 汪利华,等. 拼接检测系统平面波前稀疏子孔径排列模型的优化［J］. 光电工程, 2018, 45(5): 29-35.
|
| ［6］ |
周昌鹤, 曹正东. 激光标线仪原理探讨［J］. 物理与工程, 2007, 17(5):29-30.
|
| ［1］ |
马拉卡拉 D. 光学车间检测［M］. 3版. 北京: 机械工业出版社,2012.
|
|
Tang X L, He P A, Yu M S. Error Analysis for the Horizontal Line of Cross Line Laser［J］. Applied Laser, 2005, 25(6):384-386.
|
|
Zhou C H, Cao Z D. Principle of Laser Marking-off Equipment［J］. Physics and Engineer, 2007, 17(5):29-30.
|
|
Wang Q, Gu Y. Flatness Metrology-Value Transfer and Control of Point, Section and Surface［J］. Acta Metrologica Sinica, 2019, 40(2):1142-1148.
|
| ［11］ |
Hvisc A M, Burge J H. Structure function analysis of mirror fabrication and support errors ［J］. Proc of SPIE, 2007, 6671 :66710A.
|
| ［13］ |
Bo J, Chen X, Bo L. The error analyze of testing the large aperture flat by the Ritchey-Common method［C］//Proc. of SPIE-Intl. Symposium on Optoelectronic Technology and Application. Beijing, China, 2014, 9298, 92981A.
|
|
Hu Y, Li T F, Hao Q, et al. Vertex Radius of Curvature Fabrication Error Measurement of Aspheric Surface in Partial Compensation Interferometry［J］. Acta Metrologica Sinica, 2020, 41(8): 903-908.
|
| ［18］ |
孙永雪, 夏振涛, 王珂, 等. 离轴反射式平行光管设计及次镜检验方案研究［J］. 应用光学, 2021, 42(2):334-338.
|
| ［19］ |
赵岩, 李建双. 激光投线仪及其校准［J］. 计量学报, 2006, 27(3A): 195-196.
|
| ［4］ |
姚兴宇, 曹笑宇. 激光标线仪原理与检测方法［J］. 中国计量, 2012(7):106-107.
|
| ［10］ |
李婷, 缪东晶, 李连福, 等. 长导轨直线度分段测量拼接方法研究［J］. 计量学报, 2022, 43(7): 837-843.
|
| ［17］ |
黎雄威, 李琪, 纪峰, 等. 计量型激光椭偏仪初始入射角校准方法的研究［J］. 计量学报, 2022, 43(5): 571-577.
|
| ［2］ |
Gronle A, Pruss C, Herkommer A. Misalignment of spheres, aspheres and freeforms in optical measurement systems ［J］. Optics Express, 2022, 30(2) :797-814.
|
| ［8］ |
王 青, 顾 洋. 平面度计量-点线面之间的量值传递与控制［J］. 计量学报, 2019, 40(2): 1142-1148.
|
| ［14］ |
潘君骅. 光学非球面的设计、加工与检验［M］.苏州:苏州大学出版社, 2004.
|
| ［15］ |
胡摇, 李腾飞, 郝群, 等. 基于部分补偿干涉的非球面顶点曲率半径加工误差测量［J］. 计量学报, 2020, 41(8): 903-098.
|
| ［16］ |
宋俊芳, 孙彬, 蒲媛媛, 等. 基于激光点云数据的叶片型面三维重构［J］. 计量学报, 2023, 44(2): 171-177.
|
|
Zhao Y, Li J S. Calibration of Laser Line［J］. Acta Metrologica Sinica, 2006, 27(3A): 195-196.
|
| ［3］ |
杨照金, 王雷, 范纪红. 空间光学仪器设备及其校准检测技术［M］. 北京: 中国计量出版社,2009.
|
|
Luo Q, Wu S B, Wang L H, et al. Optimization of sparse subaperture array model for stitching detection of plane wavefront ［J］. Opto-Electronic Engineering, 2018, 45(5):29-35.
|
|
Li T, Miao D J, Li L F, et al. Research on Stitching Method for Segment Straightness Measurement of the Long Guideway［J］. Acta Metrologica Sinica, 2022, 43(7): 837-843.
|
| ［12］ |
Tamkin J M, Milster T D. Effects of structured mid spatial frequency surface errors on image performance ［J］. Applied Optics, 2010, 49(33):6522-6536.
|
|
Song J F, Sun B, Pu Y Y, et al. 3D Reconstruction of Blade Surface Based on Laser Point Cloud Data［J］. Acta Metrologica Sinica, 2023, 44(2): 171-177.
|
|
Li X W, Li Q, Ji F, et al. Research on Calibration Method of Initial Incident Angle of Metrological Laser Ellipsometer［J］. Acta Metrologica Sinica, 2022, 43(5): 571-577.
|
|
Sun Y X, Xia Z T, Wang Ke, et al. Research on off-axis reflective collimator design and inspection scheme of secondary mirror［J］. Journal of Applied Optics, 2021, 42(2):334-338.
|
|
|
|
2023, Vol. 44 
