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| Design and Experimental Study of Optical Fiber Fabry-Perot Differential Pressure Flow Sensor |
| ZHANG Bo,YANG Shui-wang,LI Chun-hui,SONG Zhi-qiang,SU Yi-ming |
| Beijing Zhenxing Institute of Metrology and Measurement, Beijing 100074, China |
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Abstract Based on the principle of fluid flow throttling, a high-precision optical fiber flow sensor was developed, with orifice plate as throttling device and two optical fiber Fabry-Perot pressure sensors as differential pressure signal measuring devices. The flow rate is measured by pressure differential across pressure transducers across the orifice plate In the mass flow measurement range of 0~100g/s, the linear equation of the flow rate and the square root of the pressure difference was obtained, and the linear fitting accuracy reached 0.99995. The developed optical fiber flow sensor has the advantages of high temperature resistance, electromagnetic interference resistance, compact size, passive sensor end and high measurement accuracy.
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Received: 15 July 2022
Published: 17 July 2023
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2023, Vol. 44 
