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| Research on Calibration Technology of Reciprocal Piezoelectric Accelerometer |
| LÜ Si-yao1,CAI Chen-guang2,KONG Ming1,YANG Ming3,LIU Zhi-hua2,LÜ Qi2 |
1. Collage of Metrology & Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China
2. National Institute of Metrology, Beijing 100029, China
3. The Electrical Engineering College, Guizhou University, Guiyang, Guizhou 550025, China |
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Abstract A calibration method for piezoelectric accelerometers with internal driving components was introduced. Based on the calibration principle of the reciprocal method, the reciprocal piezoelectric accelerometer can be calibrated by measuring the ratio and product of the two port sensitivities through two experiments. By establishing the vibration equation and mechanical model of the reciprocal piezoelectric accelerometer, the frequency response characteristics of the sensitivity ratio, sensitivity product and self-calibration coefficient are analyzed, and the corresponding measurement methods are explained. The comparison validation experiment between this method and the laser interferometry was carried out, the experimental results show that in the frequency range of 5~4000Hz, the average relative deviation of the sensitivity of the two ports does not exceed 1% and 2%, respectively, and the maximum relative deviation does not exceed 2% and 4%, respectively.
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Received: 07 May 2022
Published: 17 July 2023
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| Fund:Funded by the National Key R&D Program |
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2023, Vol. 44 
