用于扫描电子显微镜校准的10μm格栅样板

doi:10.3969/j.issn.1000-1158.2022.12.03

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Abstract Scanning electron microscope (SEM) is an important instrument for critical dimension measurement in the semiconductor field. In order to ensure the accuracy and consistency of the instrument value, the SEM needs to be calibrated. First of all, for the orthogonal distortion and linear distortion parameters mentioned in the calibration specification, a lattice sample with a nominal value of 10μm is developed by using semiconductor technology. Secondly, in order to accurately evaluate the consistency of lattice features, a rectangle detection algorithm is studied. During the measurement process, the algorithm is used to measure the lattice features of the sample, and the measurement data obtained by the atomic force microscope (AFM) is used as the reference value. The experimental results show that the rectangle detection algorithm can detect the lattice features quickly, and the test data is stable within 6nm. In addition,the developed lattice sample has good consistency,and the consistency parameters are controlled within 0.2,which can applied to the calibration of SEM.

Key words： metrology lattice sample SEM rectangle detection AFM calibration

Received: 27 December 2021 Published: 28 December 2022

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TB921

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	Articles by authors
	ZHANG Xiao-dong
	ZHAO Lin
	LI Suo-yin
	HAN Zhi-guo
	XU Xiao-qing
	WU Ai-hua

Cite this article:

ZHANG Xiao-dong,ZHAO Lin,LI Suo-yin, et al. 10μm Lattice Sample for Scanning Electron Microscope Calibration[J]. Acta Metrologica Sinica, 2022, 43(12): 1544-1548.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.12.03 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I12/1544

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