直线导轨滚转角测量误差自校正方法

doi:10.3969/j.issn.1000-1158.2022.12.02

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Abstract The precision of parallel dual-beam method is greatly affected by the beams’ parallelism when measuring a roll angle error, a five-degree-of-freedom motion error measurement system with self-correction function for roll angle measurement is proposed. The principle of a five-degree-of-freedom measuring system using double beam method is introduced, the model between double beam parallelism error and the roll angle measuring error is achieved, double autocollimator based method for monitoring the parallelism is proposed. The experimental results show that the residual error of the measured roll angle error can be reduced from 44″ to 2.7″ when a parallelism error of 15.4″ exists. The accuracy of the double-beam measurement for roll angle error has been improved effectively. The proposed method can be used to monitor the motion error of linear guides in real time.

Key words： metrology linear guides roll angle error dual beam parallelism double autocollimator error compensation

Received: 02 March 2022 Published: 28 December 2022

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TB922

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.12.02 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I12/1538

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