一种在片薄膜铂电阻温度传感器的校准方法

doi:10.3969/j.issn.1000-1158.2022.12.13

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Abstract In the on-wafer thin film temperature sensor, platinum is used as the temperature sensing film, and is manufactured by semiconductor technology, which can effectively monitor the temperature of semiconductor devices on-wafer. In order to calibrate this type of temperature sensor, according to its working principle and structural characteristics, referring to the requirements of JJG 229-2010 for calibration device, a method is presented to set up a calibration device which consists of high and low temperature probe station, 8 1/2 digital multimeter and direct current probe. The resistance values of the temperature sensor are measured at different temperatures, and a scale of resistance temperature characteristics is obtained. The on-wafer thin film platinum resistance temperature sensor is calibrated at two temperature points of 25 ℃ and 125 ℃. The verification of calibration data and calibration result shows that the proposed method is feasible and can effectively solve the calibration problem of on-wafer thin film platinum temperature sensor without connecting leads. This calibration technique also provides a reference for other types of on-wafer temperature sensors.

Key words： metrology temperature sensor microsensor on-wafer thin film high and low temperature probe table calibration method

Received: 19 November 2021 Published: 28 December 2022

PACS:

TB942

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	Articles by authors
	XU Xiao-qing
	LI Suo-yin
	LIU Chen
	ZHAO Xin-yu
	ZHAO Ge-yan
	WU Ai-hua

Cite this article:

XU Xiao-qing,LI Suo-yin,LIU Chen, et al. Calibration Method of On-Wafer Thin Film Platinum Resistance Temperature Sensor[J]. Acta Metrologica Sinica, 2022, 43(12): 1605-1609.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.12.13 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I12/1605

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