基于迈克尔逊干涉法的太赫兹波长精密测量

doi:10.3969/j.issn.1000-1158.2022.09.07

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Abstract A split-optical wavelength measurement system based on Michelson interferometry and introducing a reference laser as a measure of optical path change is built. Theoretical analysis and software simulation are used to study the influencing factors in the measurement optical path. The relative additional optical path difference caused by the deflection of the moving mirror, the deflection of the beam splitter and the deflection of the beam is used as the evaluation standard for analysis and judgment. The measurement results show that the wavelength of the 100GHz terahertz source is 3.1142mm, and the relative extended uncertainty is 0.9%(k=2). A standard terahertz frequency meter is used to conduct a comparison experiment on the same terahertz source, and the correction coefficient is 1.0035, which verified the accuracy of the measurement results and the reliability of the terahertz wavelength measurement system.

Key words： metrology terahertz waves Michelson interferometry wavelength measurement uncertainty evaluation

Received: 06 July 2021 Published: 19 September 2022

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TB96

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	Articles by authors
	WU Jia-lu
	FANG Bo
	LI Jian-min
	WANG Zhen
	GAO Yan-jiao
	CAI Jin-hui

Cite this article:

WU Jia-lu,FANG Bo,LI Jian-min, et al. Research on Precision Measurement Technology of Terahertz Wavelength Based on Interferometry[J]. Acta Metrologica Sinica, 2022, 43(9): 1147-1153.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.09.07 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I9/1147

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