在片校准件参数定值方法

doi:10.3969/j.issn.1000-1158.2022.08.02

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Abstract In order to solve the problem of inaccurate test results caused by deviation of parameter values after long time use of on-wafer calibration standards. Aiming at the equivalent circuit model of on-wafer calibration standards, a parameter determination method is proposed. The values of characteristic impedance, open capacitance, short inductance, load resistance and inductance, thru delay and loss are determined by measuring the s-parameters, length, and resistance of the on-wafer calibration standards. The test analysis is carried out with defined on-wafer calibration standards in the frequency range of 100MHz~67GHz. The results show that the test results of the on-wafer calibration standards after re-setting are closer to the actual values of the DUT than the factory values.

Key words： metrology on-wafer calibration standards definition parameters equivalent circuit model

Received: 23 September 2021 Published: 20 August 2022

PACS:

TB973

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	Articles by authors
	HUO Ye
	WU Ai-hua
	WANG Yi-bang
	LUAN Peng
	LIU Chen
	LIANG Fa-guo
	SUN Jing
	ZHAGN Li-fei

Cite this article:

HUO Ye,WU Ai-hua,WANG Yi-bang, et al. Method for Definition Parameters of On-Wafer Calibration Standards[J]. Acta Metrologica Sinica, 2022, 43(8): 979-983.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.08.02 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I8/979

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