针尖增强拉曼系统高数值孔径物镜对焦方法研究

doi:10.3969/j.issn.1000-1158.2022.08.06

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Abstract In order to improve the focusing accuracy and efficiency of tip-enhanced Raman system(TERS), an automatic focusing method is proposed by analyzing the pixel value of the spot image captured by CCD camera.Fast coarse focusing to narrow the focusing range, and then slow fine focusing to improve the focusing accuracy.The experimental results show that, compared with Tenengrad evaluation function, the variance evaluation function is more suitable for automatic focusing of tip-enhanced Raman system.When focusing on the sample surface, the unbiased estimation variance of focusing result is less than 0.25 μm, which has high repeatability and robustness.Fast coarse focusing can improve the focusing efficiency and avoid falling into the local optimal solution.The curve of slow fine focusing evaluation function presents an “M” shape near the focus, which can be adjusted by quadratic fitting to improve the focusing accuracy.

Key words： metrology tip-enhanced Raman system high numerical aperture objective auto focus evaluation function

Received: 08 March 2021 Published: 20 August 2022

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TB92

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	Articles by authors
	SUN Xiao-shuang
	GAO Si-tian
	HUANG Lu
	ZHU Min-hao
	LIU Lin-wei

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SUN Xiao-shuang,GAO Si-tian,HUANG Lu, et al. Research on Focusing Method of High Numerical Aperture Objective Lens in Tip-enhanced Raman System[J]. Acta Metrologica Sinica, 2022, 43(8): 1008-1014.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.08.06 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I8/1008

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