低浓度氟化氢标准气体的FTIR分析方法研究

doi:10.3969/j.issn.1000-1158.2022.03.21

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Abstract A method was proposed for analyzing hydrogen fluoride (HF) standard gas with low concentrations by using FTIR, of which the characteristic absorption region between 4100～4300cm-1 was used to identify and determine HF. A series of gas mixtures were prepared through the dilution of a mother cylinder standard, and produced 6 lower concentrations: 120, 100, 80.0, 60.0, 40.0, 20.0μmol/mol. Furtherly, the repeatability, linearity, and limit of detection (LOD) were evaluated. The results showed that the response value of the instrument is linear with the concentration of standard gas in the range of 20.0～120μmol/mol, and R2 is 0.9979; the repeatability of each concentration point is between 0.34%～1.1%; the detection limit is about 2.04μmol/mol.

Key words： metrology hydrogen fluoride standard gas FTIR

Received: 20 January 2021 Published: 23 March 2022

PACS:

TB99

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	Articles by authors
	LI Long
	ZHANG Ti-qiang
	YAO Qiang
	HU Shu-guo
	QIU Ni
	DENG Bao-jia
	ZHANG Ying
	ZHANG Shi-ling
	GAI Liang-jing

Cite this article:

LI Long,ZHANG Ti-qiang,YAO Qiang, et al. Use of FTIR for Analyzing Hydrogen Fluoride Standard Gas at Low Concentrations[J]. Acta Metrologica Sinica, 2022, 43(3): 433-436.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.03.21 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I3/433

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