基于反向共轴的大口径平面光学元件面形测量

doi:10.3969/j.issn.1000-1158.2021.12.04

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Abstract A surface measurement method based on reverse coaxial mode for large aperture plane optical elements is proposed. It combines the reverse coaxial line-scanning measurement mode of dual displacement sensors with three-flat test technology of multiple angle rotation. It effectively expands the measurement aperture of plane optical elements with the help of linear long guide rails. At the same time, it does not need to use a standard flat crystal during the measurement process, which can avoid introducing the uncertainty component of the reference flat of the standard plane crystal. The measurement results are directly traceable to the laser wavelength reference. The surface measurement of three 400mm diameter optical plane crystals is carried out using the measurement method, and the feasibility of the measurement method is verified through experiments.

Key words： metrology surface measurement optical elements large aperture surface reverse coaxial mode dual displacement sensors three-flat test

Received: 10 December 2020 Published: 06 December 2021

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TB92

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	Articles by authors
	ZHAO Yan-long
	LI Jia-fu
	ZHU Xiao-ping
	DU Hua
	CHEN Ai-jun
	HU Jia-cheng

Cite this article:

ZHAO Yan-long,LI Jia-fu,ZHU Xiao-ping, et al. Surface Measurement Method Based on Reverse Coaxial Mode for Large Aperture Plane Optical Elements[J]. Acta Metrologica Sinica, 2021, 42(12): 1570-1577.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2021.12.04 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2021/V42/I12/1570

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