1.China Jiliang University, College of Engineering Measurement, Hangzhou, Zhejiang 310018, China;
2. National Institute of Metrology, Beijing 100029, China;
3.Tianjin University, Tianjin 300072, China;
4.Suzhou Institute of Measurement and Testing, Suzhou, Jiangsu 215128, China
Abstract A calibration method of high-precision capacitive displacement sensor is described based on laser interferometer and a single axle precision displacement stage, and developed a set of calibration device. Taking advantage of the relationship between the voltage and the displacement, the single axle precision displacement stage generate nano-scale displacement, meanwhile using laser interferometer and the capacitive displacement sensor to be calibrated to measure the small displacement synchronously. The device can precisely calibrate linearity, repeatability and measurement resolution of the capacitive displacement sensor. Finally, the calibration accuracy and practicability of the method are verified by experiments,the main factors affecting calibration are analyzed and the measurement uncertainty is 2.2 nm .
2015, Vol. 36 
