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| Study on Tip Alignment Method of Dual-probe Atomic Force Microscopy |
| ZHANG Hua-kun1, GAO Si-tian1,2, LI Wei2, SHI Yu-shu2, WANG He-qun2 |
1.School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei,Anhui 230009, China;
2. National Institute of Metrology, Beijing 100029, China |
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Abstract Dual probes alignment measurement can virtually eliminate the effect of tip shape of traditional atomic force microscopy (AFM) on critical measurement (CD). Two tips (probe A and probe B) need contact to each other before measurement to establish a zero reference point. A method of progressive two-dimensional scanning is used to realized dual-probe nanoscale alignment. Firstly, it will align two probes to within 1μm through vision guidance. Secondly, the two probes continue to close, probe B is scanned by probe A in plane XOZ while reducing the scanning range and scanning step gradually to get the nanometer coordinate of probe B (YB，ZB). Lastly, the probe A will be move to YB and ZB in X and Z directions respectively, untill the probe A moves to touch the probe B in X direction. Results indicated that this method can effectively align dual probes, and the alignment accuracy is 10 nm.
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2015, Vol. 36 
