微机电系统微摩擦测试技术研究

doi:10.3969/j.issn.1000-1158.2021.10.05

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Abstract In order to solve the problem of micro-friction in micro-electro-mechanical systems(MEMS), a micro-friction test technology based on light reflection was proposed. The basic principles and implementation steps of the test method were discussed, the test prototype was developed, the complete process of measurement and calibration of the test system was analyzed in detail, and finally the measurement data and curve of the test system were obtained. Through the micro-friction experiment test on the Cu-Si and Al-Si surfaces, the micron-level micro-friction coefficients of the Cu-Si and Al-Si surfaces were obtained. It provides a basis for the understanding and design of the micro-mechanisms motion characteristics.

Key words： metrology micro-friction micro-electro-mechanical system test technology light reflection metrological calibration

Received: 20 October 2020 Published: 18 October 2021

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TB931

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	Articles by authors
	WU Cui-hong
	YU Bo
	ZHAO Jing
	LIU Xiao-han
	WU Xin-yu

Cite this article:

WU Cui-hong,YU Bo,ZHAO Jing, et al. Research on Micro Friction Testing Technology of Micro-electro-mechanical System[J]. Acta Metrologica Sinica, 2021, 42(10): 1288-1293.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2021.10.05 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2021/V42/I10/1288

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